Fabrication of piezoelectric AlN thin film for FBARs

This paper focuses on the fabrication of film bulk acoustic-wave resonator (FBAR) comprising an aluminum nitride (AlN) piezoelectric thin film sandwiched between two metal electrodes and located on a silicon substrate with a low-stress silicon nitride (Si₃N₄) support membrane for high frequency wireless applications, and analyzes the optimization of the thin AlN film deposition parameters on Mo electrodes using the reactive RF magnetron sputter system. Several critical parameters of the sputtering process such as RF power and Ar/N₂ flow rate ratio were studied to clarify their effects on different electrodes characteristics of the AlN films. The experiment indicated that the process for Mo electrode was easier compared with that of the Pt/Ti or Au/Cr bi-layer electrode as it entailed only one photo resist and metal deposition step. Besides, Pt/Ti or Au/Cr electrodes reduced the resonance frequency due to their high mass density and low bulk acoustic velocity. Compared with the case of the Al bottom electrode, there is no evident amorphous layer between the Mo bottom electrode and the deposited AlN film. The characteristics of the FBAR devices depend not only upon the thickness and quality of the AlN film, but also upon the thickness of the top electrode and the materials used. The results indicate that decreasing the thickness of either the AlN film or the top electrode increases the resonance frequency. This suggests the potential of tuning the performance of the FBAR device by carefully controlling AlN film thickness. Besides, increasing either the thickness of the AlN film or higher RF power has improved a stronger c-axis orientation and tended to promote a narrower rocking curve full-width at half-maximum (FWHM), but increased both the grain size and the surface roughness. An FBAR device fabricated under optimal AlN deposition parameters has demonstrated the effective electromechanical coupling coefficient (k _eff²) and the quality factor (Q _{f x} ) are about 1.5% and 332, respectively.     

Numerical analysis of the s1020 airfoils in tandem under different flapping configurations

The objective of this project is to improve the performance of the efficiency, thrust and lift of flapping wings in tandem arrangement. This research investigates the effect of the arrangement of the airfoils in tandem on the performance of the airfoils by varying the phase difference and distance between the airfoils. Three flapping configurations from an earlier phase of a research which gives high efficiency, thrust and lift are used in the tandem simulation. It is found all the different flapping configurations show improvement in the efficiency, thrust or lift when the distance between the two airfoils and the phase angle between the heaving positions of the two airfoils are optimal. The average thrust coefficient of the tandem arrangement managed to attain more than twice that of the single one （4.84 vs. 2.05）. On the other hand, the average lift coefficient of the tandem arrangement also increased to 4.59, as compared to the original single airfoil value of 3.04. All these results obtained will aid in the design of a better ornithopter with tandem wing arrangement.     

Continuous wavelet transform for micro-component profile measurement using vertical scanning interferometry

White-light interferometric techniques have been widely used in three-dimensional (3D) profiling. This paper presents a new method based on vertical scanning interferometry (VSI) for the 3D profile measurement of a micro-component that contains sharp steps. The use of a white-light source in the system overcomes the phase ambiguity problem often encountered in monochromatic interferometry and also reduces speckle noises. A new algorithm based on the continuous wavelet transform (CWT) is used to retrieve the phase of an interferogram. The algorithm accurately determines local fringe peak and improves the vertical resolution of the measurement. The proposed method is highly resistant to noise and is able to achieve high accuracy. A micro-component (lamellar grating) fabricated by sacrificial etching technique is used as a test specimen to verify the proposed method. The measurement uncertainty of the experimental results is discussed.     

Micro-humps formed in excimer laser ablation of polyimide using mask projection system

In this paper we report the results of an investigation into surface deformation caused by thermal effects during excimer laser ablation of polyimide. Obvious surface deformation around hole entrances was observed during the experiment. The surface topology and cross section of the ablated holes were analyzed using topography measurement tool and scanning electron microscopy. It was shown that a micro-hump of 17 to 150 nm in height and 1 to 3 μm in width was formed above the level of the unablated surface. The deformed surface showed rough and color-changed characteristics. An optical diffraction model was employed to explain the cause of this kind of deformation. It was found that the ablating and heating by a near- and under-threshold laser beam became a thermal effect in polyimide material ablation, which was contributed to by a diffraction effect of the optical projection system. Received: 9 October 2001 / Accepted: 17 October 2001 / Published online: 23 January 2002     

Deformation and profile measurement using the digital projection grating method

This paper presents a digital projection grating method for full field measurement of out-of-plane deformation and shape of an object. Two grating patterns on an object before and after deformation are captured by a CCD camera and stored in a computer. With the aid of Fast Fourier Transform (FFT) and signal demodulating techniques, a wrapped phase map is generated. The phases are expanded in the range of 0–2π and compared with the resulting moiré pattern. An unwrapping procedure is used to obtain a continuous phase. In addition, a digital method for fractional fringe multiplication is also developed. Results on deformation and object profile measurements are presented.     

Time delay and integration imaging for internal profile inspection

A time delay and integration imaging technique is presented and applied to internal surface contour measurement. Using the proposed optical arrangement, inspection of profiles of objects which are mounted on the internal surface of a hollow cylinder can be carried out. Tests conducted on objects with diameters ranging from 40 to 214 mm show good agreement with results obtained from conventional profilometer.     

Effect of the combined thermal and mass concentration gradients on the stability of a chemically reacting fluid in a porous medium

Summary The onset of instability, due to the combined effects of thermal and mass concentration gradients, is investigated in the hydrodynamic stability regime. It is found that the critical Rayleigh number, which determines the onset of instability, increases as the chemical reaction rate constant increases hyperbolically over a wide range of values at both moderate and high permeabilities. In addition, the instability grows with increase in porosity. Previous results show that the critical Rayleigh number rises linearly when only the mass concentration gradient is considered.     

Determination of oestriol in pregnancy urine by normal-phase high-performance liquid chromatography with electrochemical detection

A method for the determination of oestriol in pregnancy urine by normal-phase high-performance liquid chromatography with electrochemical detection is described. A large-volume wall-jet cell with an Ag-Ag+ reference electrode was used as the detector system. The limit of detection obtained is comparable to that of electrochemical detection following reversed-phase liquid chromatography. One of the advantages of electrochemical detection with normal-phase systems is that adsorption problems are minimized.     

Effect of operating variables on rejection of indium using nanofiltration membranes

Indium and its compounds exhibit excellent semiconductor properties however they are suspected carcinogenic to human beings. For the first time, we applied nanofiltration (NF) technology to the separation of indium from a synthetic wastewater as a literature review revealed little information on the treatment of such a waste. In this research, three types of nanofiltration membranes, NTR7450, ES10 and ES10C, were employed to compare their performances under various operating conditions. With increasing indium concentration in the feed solution, the rejection rates decreased in all the membranes, which could be ascribed to concentration polarization and ion-shielding effects. The changes of indium concentration in the permeate (C_p) were then correlated to the concentration factor (CF) during nanofiltration of the feed solution. The experimental results were well predicted by the theoretical analysis. Increase of operating pressure enhanced their rejection rates of indium, which might be attributed to the “dilute effect”. The real rejection (f_r) of indium by nanofiltration was found permeate flux dependent. Based on the results obtained, the nanofiltration mechanisms of multivalent cations such as In³⁺ were delineated and discussed. It was found that most of the models developed from nanofiltration of univalent and divalent cations were still valid for the nanofiltration process of trivalent cations. However, the strong chemical potential of trivalent cations to form complexes in the solution around neutral pH exerted a significant impact on indium rejection rates of the NF membranes. The experimental results suggest a stable performance of nanofiltration when applied to the semiconductor wastewater, however, acidic conditions should be avoided.